i-Cap Q ICP-MS application note

仪器资料 · 发表于 2018-7-6 13:22:59

i-Cap Q ICP-MS application note

Goal
To determine ultra-trace metal concentrations in semiconductor grade nitric
acid (HNO3). Demonstrate the use of cold plasma (CP) and kinetic energy
discrimination (KED) to reduce background equivalent concentrations (BEC)
and improve detection limits (LoD). Demonstrate the use of the iCAP Qs
ICP-MS to perform reproducible ultra-trace ng/L (ppt) measurements of
semiconductor relevant elements in nitric acid.

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