Microrobot System for Automatic Nanohandling inside a Scanning Electron Microsco

仪器资料 · 发表于 2018-7-2 09:04:13

Microrobot System for Automatic Nanohandling inside a
Scanning Electron Microscope

Abstract - Current research work on the development of an
automated nanohandling cell in a scanning electron microscope
(SEM) is presented. An experimental setup is shown, in which
two micro robots cooperate in the vacuum chamber of an SEM.
A client-server control system that can integrate various microrobots
and sensors has been developed and evaluated by automatic
handling of TEM (transmission electron microscope)
lamellae. The robots are controlled in a closed-loop way by using
images from several CCD cameras and from the SEM. Algorithms
for real-time processing of noisy SEM images have been
implemented and tested. Finally, the experiment on automatic
handling of TEM lamellae inside an SEM is described

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